Tris(Dimethylamino)Silane 3DMAS 三(二甲胺基)硅烷

CAS 15112-89-7 MFCD00048006

化学结构图

15112-89-7
SMILES: CN(C)[SiH](N(C)C)N(C)C

化学属性

Melting Point-90 °C (lit.)
Mol. Formula[(CH3)2N]3SiH
Mol. Weight161
Density0.84
Flash Point77°F
Appearance colorless to light yellow liq.
Boiling Point145-148°C (4°C/16mm)
Stabilityair sensitive, moisture sensitive
Danger-Level-
pH-:-
Redox-

别名和识别编码

Chemical NameTris(Dimethylamino)Silane
Synonym (Me2N)3SiH N,N,N',N',N'',N''-Hexamethylsilanetriamine TDMAS Tris(dimethylamido)silane Tris(dimethylamino)silane (Me2N)3SiH 三(二甲胺基)硅烷 N,N,N',N',N'',N''-Hexamethylsilanetriamine TDMAS Tris(dimethylamido)silane Tris(dimethylamido)silane (Me2N)3SiH N,N,N',N',N'', N''-Hexamethylsilanetriamine N,N,N',N',N'',N''-Hexamethylsilanetriamine TDMAS Tris(dimethylamido)silane
EC Number239-165-0
Chemical Name Translation三(二甲胺基)硅烷
Beilstein Registry Number1901643
PubChem Substance ID329758267
MDL NumberMFCD00048006
CAS Number15112-89-7
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分类

  • {SNA} 570133
  • {SNA} Chemical Synthesis, Reduction, Silanes, Synthetic Reagents
  • {SNA} CVD and ALD Precursors Packaged for Deposition Systems, Micro/NanoElectronics, Silane, Vapor Deposition Precursors, 材料科学

安全信息

GHS Symbol
WGK Germany3
Hazard statements
  • H314 Causes severe skin burns and eye damage 导致严重的皮肤灼伤和眼睛损伤
  • H330 Fatal if inhaled 吸入致命
  • H311 Toxic in contact with skin 皮肤接触中毒
  • H261 In contact with water releases flammable gas 与水接触时释放可燃气体。
  • H225 Highly flammable liquid and vapour 高度易燃液体和蒸气
  • H302 Harmful if swallowed 吞食有害
Personal Protective Equipment Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter
RTECSVV5800000
Precautionary statements
  • P402+P404
  • P231+P232
  • P280 Wear protective gloves/protective clothing/eye protection/face protection. 戴防护手套/防护服/眼睛的保护物/面部保护物。
  • P210 Keep away from heat/sparks/open flames/hot surfaces. — No smoking. 远离热源/火花/明火/热的表面。——禁止吸烟。
  • P370+P378
  • P403+P235
  • P260 Do not breathe dust/fume/gas/mist/vapours/spray. 不要吸入粉尘/烟/气体/烟雾/蒸汽/喷雾。
  • P284 Wear respiratory protection.? 佩戴呼吸保护装置。
  • P422 Store contents under… 存储目录在…之下。
Signal word Danger
Hazard Codes F,C
Safety Statements
  • S45 In case of accident or if you feel unwell seek medical advice immediately (show the label where possible) 发生事故时或感觉不适时,立即求医(可能时出示标签);
  • S26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice 眼睛接触后,立即用大量水冲洗并征求医生意见;
  • S36/37/39 Wear suitable protective clothing, gloves and eye/face protection 穿戴适当的防护服、手套和眼睛/面保护;
  • S43 In case of fire use ... (indicate in the space the precise type of fire-fighting equipment. If water increases the risk add -?Never use water) 着火时使用(指明具体的消防器材种类,如果用水增加危险,注明“禁止用水”
  • S16 Keep away from sources of ignition - No smoking 远离火源,禁止吸烟;
Risk Statements
  • R11 Highly flammable 非常易燃
  • R20 Harmful by inhalation 吸入有害
  • R29 Contact with water liberates toxic gas. 遇水释放出有毒气体
  • R34 Causes burns 会导致灼伤
  • R52/53
  • R15 Contact with water liberates extremely flammable gases 遇水会释放出极端易燃的气体
TYPE OF TEST            : LD50 - Lethal dose, 50 percent kill
ROUTE OF EXPOSURE       : Administration onto the skin
SPECIES OBSERVED        : Rodent - rabbit
DOSE/DURATION           : 477 mg/kg
TOXIC EFFECTS :
   Lungs, Thorax, or Respiration - chronic pulmonary edema
   Liver - other changes
   Nutritional and Gross Metabolic - weight loss or decreased weight gain
REFERENCE :
   TIHEEC Toxicology and Industrial Health.  (Princeton Scientific Pub. Co.,
   POB 2155, Princeton, NJ 08540)  V.1-    1985-  Volume(issue)/page/year:
   5,45,1989

TYPE OF TEST            : LD50 - Lethal dose, 50 percent kill
ROUTE OF EXPOSURE       : Oral
SPECIES OBSERVED        : Rodent - rat
DOSE/DURATION           : 594 mg/kg
TOXIC EFFECTS :
   Lungs, Thorax, or Respiration - dyspnea
   Gastrointestinal - other changes
   Nutritional and Gross Metabolic - weight loss or decreased weight gain
REFERENCE :
   TIHEEC Toxicology and Industrial Health.  (Princeton Scientific Pub. Co.,
   POB 2155, Princeton, NJ 08540)  V.1-    1985-  Volume(issue)/page/year:
   5,45,1989

TYPE OF TEST            : LC50 - Lethal concentration, 50 percent kill
ROUTE OF EXPOSURE       : Inhalation
SPECIES OBSERVED        : Rodent - rat
DOSE/DURATION           : 38 ppm/6H
TOXIC EFFECTS :
   Sense Organs and Special Senses (Eye) - lacrimation
   Behavioral - ataxia
   Gastrointestinal - changes in structure or function of salivary glands
REFERENCE :
   TIHEEC Toxicology and Industrial Health.  (Princeton Scientific Pub. Co.,
   POB 2155, Princeton, NJ 08540)  V.1-    1985-  Volume(issue)/page/year:
   5,45,1989

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