Tetrakis(dimethylamido)hafnium(IV) TDMAH 四(二甲氨基)铪(IV)

CAS 19782-68-4 MFCD01862473

化学结构图

19782-68-4
SMILES: CN(C)[Hf](N(C)C)(N(C)C)N(C)C

化学属性

Mol. Formula[(CH3)2N]4Hf
Mol. Weight355
Appearance colorless to pale yellow xtl.
Stabilitymoisture sensitive, store cold
Boiling Point85°C/0.1mm
Melting Point38-41°C
Density1.098
Danger-Level-
pH-:-
Redox-

别名和识别编码

Chemical NameTetrakis(dimethylamido)hafnium(IV) TDMAH
Synonym 四(二甲胺基)铪(IV) Dimethylamine hafnium(4+) salt; Hafnium(4+) dimethylamide; Tetrakis(dimethylamido)hafnium; Tetrakis(dimethylamino)hafnium TDMAH TDMAH 四(二甲胺基)铪(IV)
PubChem Substance ID24884811
Chemical Name Translation四(二甲氨基)铪(IV)
InChIKeyZYLGGWPMIDHSEZ-UHFFFAOYSA-N
MDL NumberMFCD01862473
CAS Number19782-68-4
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分类

  • {SNA} CVD and ALD Precursors by Metal, Hafnium, Micro/NanoElectronics, Vapor Deposition Precursors, 材料科学
  • {SNA} CVD and ALD Precursors by Metal, Hafnium, Materials Science, Micro/NanoElectronics, Vapor Deposition Precursors
  • {SNA} 72: Hafnium, CVD and ALD Precursors Packaged for Deposition Systems, CVD and ALD Precursors by Metal, Hafnium,

相关文献及参考

  • 1. Appl. Phys. Lett. 91 , 193503, (2007)

安全信息

WGK Germany3
Precautionary statements
  • P422 Store contents under… 存储目录在…之下。
  • P231+P232
  • P280 Wear protective gloves/protective clothing/eye protection/face protection. 戴防护手套/防护服/眼睛的保护物/面部保护物。
  • P305+P351+P338
  • P210 Keep away from heat/sparks/open flames/hot surfaces. — No smoking. 远离热源/火花/明火/热的表面。——禁止吸烟。
  • P310 Immediately call a POISON CENTER or doctor/physician. 立即呼救解毒中心或医生/医师。
  • P402+P404
  • P370+P378
Hazard statements
  • H228 Flammable solid 易燃固体
  • H314 Causes severe skin burns and eye damage 导致严重的皮肤灼伤和眼睛损伤
  • H261 In contact with water releases flammable gas 与水接触时释放可燃气体。
Hazard Codes F,C
GHS Symbol
Personal Protective Equipment Eyeshields, Faceshields, full-face particle respirator type N100 (US), Gloves, respirator cartridge type N100 (US), type P1 (EN143) respirator filter, type P3 (EN 143) respirator cartridges
Signal word Danger
Safety Statements
  • S45 In case of accident or if you feel unwell seek medical advice immediately (show the label where possible) 发生事故时或感觉不适时，立即求医（可能时出示标签）；
  • S26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice 眼睛接触后，立即用大量水冲洗并征求医生意见；
  • S36/37/39 Wear suitable protective clothing, gloves and eye/face protection 穿戴适当的防护服、手套和眼睛/面保护；
  • S43 In case of fire use ... (indicate in the space the precise type of fire-fighting equipment. If water increases the risk add -?Never use water) 着火时使用（指明具体的消防器材种类，如果用水增加危险，注明“禁止用水”
  • S6 Keep under ... (inert gas to be specified by the manufacturer) 将该物质保存在生产厂家指定的惰性气体中；
Risk Statements
  • R11 Highly flammable 非常易燃
  • R14 Reacts violently with water 遇水会猛烈反应
  • R34 Causes burns 会导致灼伤
Restrict 危险品

系列性分类

  1. Materials Science 材料科学
  2. Micro/NanoElectronics - Materials Science
  3. Vapor Deposition Precursors - Micro/NanoElectronics
  4. CVD and ALD Precursors by Metal - Vapor Deposition Precursors
  5. Hafnium - CVD and ALD Precursors by Metal
  1. CVD & ALD Precursors
  1. CVD & ALD Precursors
  2. Hafnium
  1. Metal Alkylamides
  2. Hafnium

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