Tris(diethylamido)(tert-butylimido)tantalum(V) 三(二乙基氨基)叔丁酰胺钽

CAS 169896-41-7 MFCD02684506

化学结构图

169896-41-7
SMILES: CC(C)(C)N=[Ta](N(CC)CC)(N(CC)CC)N(CC)CC

化学属性

TSCANo
Boiling Point90°/0.1mm
Mol. FormulaC16H39N4Ta
Mol. Weight468
Density1.252 g/ml@25°C
Appearance colorless to pale yellow liq.
Stabilityair sensitive, moisture sensitive
Danger-Level
pH:
Redox

别名和识别编码

Chemical NameTris(diethylamido)(tert-butylimido)tantalum(V)
Synonym Tris(diethylamido)(tert-butylimido)tantalum(V) TBTDET 三(二乙基氨基)叔丁酰胺钽(V) 三(二乙基氨基)叔丁酰胺钽(V) 三(二乙基氨基)叔丁酰胺钽
PubChem Substance ID24885014
Chemical Name Translation三(二乙基氨基)叔丁酰胺钽
MDL NumberMFCD02684506
CAS Number169896-41-7
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分类

  • {SA} 73: Tantalum, CVD and ALD Precursors Packaged for Deposition Systems, CVD and ALD Precursors by Metal, Materials Science, Micro/NanoElectronics, Tantalum, Vapor Deposition Precursors
  • {SNA} CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, Materials Science, Micro/NanoElectronics, Tantalum, Vapor Deposition Precursors
  • {SNA} 73: Tantalum, CVD and ALD Precursors Packaged for Deposition Systems, CVD and ALD Precursors by Metal, Micro/NanoElectronics, Tantalum, Vapor Deposition Precursors, 材料科学
  • {SNA} CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis,

相关文献及参考

安全信息

GHS Symbol
WGK Germany3
Hazard Codes C
Hazard statements
  • H314 Causes severe skin burns and eye damage 导致严重的皮肤灼伤和眼睛损伤
  • H261 In contact with water releases flammable gas 与水接触时释放可燃气体。
  • H226 Flammable liquid and vapour 易燃液体和蒸气
Personal Protective Equipment Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter
Precautionary statements
  • P422 Store contents under… 存储目录在…之下。
  • P310 Immediately call a POISON CENTER or doctor/physician. 立即呼救解毒中心或医生/医师。
  • P231+P232
  • P280 Wear protective gloves/protective clothing/eye protection/face protection. 戴防护手套/防护服/眼睛的保护物/面部保护物。
  • P305+P351+P338
Signal word Danger
Safety Statements
  • S26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice 眼睛接触后，立即用大量水冲洗并征求医生意见；
  • S30 Never add water to this product 切勿将水加入该产品中；
  • S20 When using do not eat or drink 使用时，不得进食，饮水；
  • S45 In case of accident or if you feel unwell seek medical advice immediately (show the label where possible) 发生事故时或感觉不适时，立即求医（可能时出示标签）；
  • S36/37/39 Wear suitable protective clothing, gloves and eye/face protection 穿戴适当的防护服、手套和眼睛/面保护；
  • S8 Keep container dry 保持容器干燥；
  • S43 In case of fire use ... (indicate in the space the precise type of fire-fighting equipment. If water increases the risk add -?Never use water) 着火时使用（指明具体的消防器材种类，如果用水增加危险，注明“禁止用水”
UN Number UN3129
Risk Statements
  • R14 Reacts violently with water 遇水会猛烈反应
  • R34 Causes burns 会导致灼伤
  • R10 Flammable 易燃
  • R14/15 Reacts violently with water, liberating extremely flammable gases 遇水剧烈反应，释放出高度可燃气体
Storage condition Air & Moisture Sensitive
Packing GroupII
Restrict

系列性分类

  1. Chemical Synthesis 化学合成
  2. Catalysis and Inorganic Chemistry 催化剂和无机化学
  3. Tantalum - Catalysis and Inorganic Chemistry
  1. Materials Science 材料科学
  2. Micro/NanoElectronics - Materials Science
  3. Vapor Deposition Precursors - Micro/NanoElectronics
  4. CVD and ALD Precursors by Metal - Vapor Deposition Precursors
  5. Tantalum - CVD and ALD Precursors by Metal
  1. CVD & ALD Precursors
  1. CVD & ALD Precursors
  2. Tantalum

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