TRIS(DIETHYLAMIDO)(ETHYLIMIDO)TANTALUM(V) 三(二乙基氨基)(乙基酰亚胺基)钽(V)

CAS 67313-80-8 MFCD03093879

化学结构图

67313-80-8
SMILES: CCN=[Ta](N(CC)CC)(N(CC)CC)N(CC)CC

化学属性

Mol. FormulaC2H5NTa(N(C2H5)2)3
Mol. Weight440.40
Density1.31 g/mL at 25 °C(lit.)
Refractive indexn20/D 1.51(lit.)

别名和识别编码

Chemical NameTris(diethylamido)(ethylimido)tantalum(V)
Synonym 三(二乙氨基)(乙基亚氨基)钽(V) 三(二乙基氨基)(乙基酰亚胺基)钽(V)
MDL NumberMFCD03093879
PubChem Substance ID24873976
CAS Number67313-80-8
Chemical Name Translation三(二乙基氨基)(乙基酰亚胺基)钽(V)
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分类

  • {SNA} CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, Materials Science, Micro/NanoElectronics, Tantalum, Vapor Deposition Precursors
  • {SA} CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, Materials Science, Micro/NanoElectronics, Tantalum, Vapor Deposition Precursors
  • {SNA} CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, Micro/NanoElectronics, Tantalum, Vapor Deposition Precursors, 材料科学

相关文献及参考

安全信息

WGK Germany3
Precautionary statements
  • P210 Keep away from heat/sparks/open flames/hot surfaces. — No smoking. 远离热源/火花/明火/热的表面。——禁止吸烟。
  • P310 Immediately call a POISON CENTER or doctor/physician. 立即呼救解毒中心或医生/医师。
  • P280 Wear protective gloves/protective clothing/eye protection/face protection. 戴防护手套/防护服/眼睛的保护物/面部保护物。
  • P305+P351+P338
Hazard statements
  • H314 Causes severe skin burns and eye damage 导致严重的皮肤灼伤和眼睛损伤
  • H225 Highly flammable liquid and vapour 高度易燃液体和蒸气
Hazard Codes F
GHS Symbol
Personal Protective Equipment Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter
Signal word Danger
Safety Statements
  • S26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice 眼睛接触后，立即用大量水冲洗并征求医生意见；
  • S27 Take off immediately all contaminated clothing 立即脱掉全部污染的衣服；
  • S36/37/39 Wear suitable protective clothing, gloves and eye/face protection 穿戴适当的防护服、手套和眼睛/面保护；
  • S16 Keep away from sources of ignition - No smoking 远离火源，禁止吸烟；
Risk Statements
  • R11 Highly flammable 非常易燃
  • R34 Causes burns 会导致灼伤

系列性分类

  1. Chemical Synthesis 化学合成
  2. Catalysis and Inorganic Chemistry 催化剂和无机化学
  3. Tantalum - Catalysis and Inorganic Chemistry
  1. Materials Science 材料科学
  2. Micro/NanoElectronics - Materials Science
  3. Vapor Deposition Precursors - Micro/NanoElectronics
  4. CVD and ALD Precursors by Metal - Vapor Deposition Precursors
  5. Tantalum - CVD and ALD Precursors by Metal

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