(T-Butylimido)Tris(Ethylmethylamino)Tantalum(V) (叔丁基酰亚胺)三(乙基甲基氨基)钽(V)

CAS 511292-99-2 MFCD05663776

化学结构图

511292-99-2
SMILES: CCN(C)[Ta](=NC(C)(C)C)(N(C)CC)N(C)CC

化学属性

Density1.323 g/mL at 21 °C(lit.)
Mol. FormulaC13H33N4Ta
Appearance yellow liq.
Mol. Weight426.38
Stabilityair sensitive, moisture sensitive
Danger-Level-
pH-:-
Redox-

别名和识别编码

Chemical Name(T-Butylimido)Tris(Ethylmethylamino)Tantalum(V)
PubChem Substance ID24896189
MDL NumberMFCD05663776
Chemical Name Translation(叔丁基酰亚胺)三(乙基甲基氨基)钽(V)
Synonym 三(乙基甲酰胺基)(叔丁基酰亚氨)钽(V)
CAS Number511292-99-2
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分类

  • {SNA} CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, Micro/NanoElectronics, Tantalum, Tantalum Catalysts, Vapor Deposition Precursors, 材料科学
  • {SA} CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, Materials Science, Micro/NanoElectronics, Tantalum, Vapor Deposition Precursors
  • {SNA} CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, Micro/NanoElectronics, Tantalum, Vapor Deposition Precursors, 材料科学

安全信息

GHS Symbol
WGK Germany3
Hazard Codes C
Hazard statements
  • H314 Causes severe skin burns and eye damage 导致严重的皮肤灼伤和眼睛损伤
  • H261 In contact with water releases flammable gas 与水接触时释放可燃气体。
  • H226 Flammable liquid and vapour 易燃液体和蒸气
Personal Protective Equipment Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter
Precautionary statements
  • P422 Store contents under… 存储目录在…之下。
  • P310 Immediately call a POISON CENTER or doctor/physician. 立即呼救解毒中心或医生/医师。
  • P231+P232
  • P280 Wear protective gloves/protective clothing/eye protection/face protection. 戴防护手套/防护服/眼睛的保护物/面部保护物。
  • P305+P351+P338
Signal word Danger
Risk Statements
  • R10 Flammable 易燃
  • R14/15 Reacts violently with water, liberating extremely flammable gases 遇水剧烈反应，释放出高度可燃气体
  • R34 Causes burns 会导致灼伤
Safety Statements
  • S45 In case of accident or if you feel unwell seek medical advice immediately (show the label where possible) 发生事故时或感觉不适时，立即求医（可能时出示标签）；
  • S26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice 眼睛接触后，立即用大量水冲洗并征求医生意见；
  • S36/37/39 Wear suitable protective clothing, gloves and eye/face protection 穿戴适当的防护服、手套和眼睛/面保护；
  • S43 In case of fire use ... (indicate in the space the precise type of fire-fighting equipment. If water increases the risk add -?Never use water) 着火时使用（指明具体的消防器材种类，如果用水增加危险，注明“禁止用水”
Restrict 危险品

系列性分类

  1. Materials Science 材料科学
  2. Micro/NanoElectronics - Materials Science
  3. Vapor Deposition Precursors - Micro/NanoElectronics
  4. CVD and ALD Precursors by Metal - Vapor Deposition Precursors
  5. Tantalum - CVD and ALD Precursors by Metal
  1. CVD & ALD Precursors
  1. CVD & ALD Precursors
  2. Tantalum

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